12026118 SENSORS AND ACTUATORS 3(3-0-6)
Required Textbook :
Introduction to Microelectronic Fabrication 2nd (Richard C. Jaeger),
Introduction to Sensors. Boca Raton: CRC Press
Course Description
Sensors and Transducers- Definitions, terminology, classification, characteristics of parameters
Thermal sensors, Mechanical sensors, Pressure sensors, Sensors and transducers for liquid environment measurements, Optical sensors and transducers, Chemical and physical sensors for gas and liquid media
Gas sensors, Piezoelectric actuators, MEMS microtransducers
Lithography, Thermal oxidation, Diffusion, Ion implantation, Chemical vapor deposition, Evaporation and metallization, Annealing, Future trends
| Topics | Reading |
| 1. Sensor and Actuator 1 | Lecture1 |
| 2. Sensor and Actuator 2 | Lecture2 |
| 3. Electrostatic Transducers | Lecture3 |
| 4. Overview of Microelectronic Fabrication | Lecture4 |
| 5. Photolithography | Lecture5 |
| 6. Thermal Oxidation of Silicon | Lecture6 |
| 7. Diffusion | Lecture7 |
| 8. Ion Implantation | Lecture8 |
| 9. Film Deposition | Lecture9 |
| 10. Interconnections and Contacts | Lecture10 |